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National Repository of Grey Literature

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Reactive sputtering Al2O3 Dušek, Jan ; Boušek, Jaroslav (referee) ; Fořt, Tomáš (advisor) Diploma thesis describes technology of pulse reactive magnetron sputtering of Al2O3 coating. Furthermore it deals with design of deposition process and testing new aluminium target. The technological window was determined by tests. As a result, it was possible to create Al2O3 coatings in the widest possible working range. The coatings created by apparatus PLS 160 were tested for optical properties in order to obtain transmittance. Besides the optical tests, the evaluation of mechanical properties and adhesion were performed. The obtained results from measurement were evaluated. Based on the results, some possible applications of the coating were suggested. Detailed record

Reactive sputtering Al2O3 Dušek, Jan ; Boušek, Jaroslav (referee) ; Fořt, Tomáš (advisor) Diploma thesis describes technology of pulse reactive magnetron sputtering of Al2O3 coating. Furthermore it deals with design of deposition process and testing new aluminium target. The technological window was determined by tests. As a result, it was possible to create Al2O3 coatings in the widest possible working range. The coatings created by apparatus PLS 160 were tested for optical properties in order to obtain transmittance. Besides the optical tests, the evaluation of mechanical properties and adhesion were performed. The obtained results from measurement were evaluated. Based on the results, some possible applications of the coating were suggested. Detailed record

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